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2 years ago
| 工艺功能 | 部件实现<br />PID | 确认项目 |
| ------------------- | -------------------------------- | ---------------------------------------------- |
| 提供局部A级送风环境 | 风机、压差表、高效过滤器、均流膜 | 高效检漏<br />风速<br />初始压差<br />悬浮粒子 |
| 防止粉尘逸散:负压 | | 气流流型 |
| 提供照明 | 灯具 | 照度确认 |
| 提供电力 | 插座 | 插座供电情况 |
| 安全 | | 噪声<br />急停<br />断电恢复 |
| CSV | | 权限?报警? |